Patent Assignment
Reel/Frame 043375/0004
Assignment of Assignor's Interest
Recorded: 2017-08-23
Pages: 4
Assignors
EASON, KWAME
Executed: 2017-08-01
PARK, PILYEON
Executed: 2017-07-28
KAWAGUCHI, MARK NAOSHI
Executed: 2017-08-01
PARK, SEUNG-HO
Executed: 2017-08-01
CHANG, HSIAO-WEI
Executed: 2017-08-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Aspect Ratio Selective Lateral Etch Using Cyclic Passivation and Etching