Patent Assignment
Reel/Frame 043392/0792
Assignment of Assignor's Interest
Recorded: 2017-08-24
Pages: 4
Assignor
UEDA, AKIHIRO
Executed: 2017-08-02
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Control Method of Movable Body, Exposure Method, Device Manufacturing Method, Movable Body Apparatus, and Exposure Apparatus