Patent Assignment
Reel/Frame 043419/0583
Assignment of Assignor's Interest
Recorded: 2017-08-28
Pages: 3
Assignors
NISHINO, TORU
Executed: 2017-08-25
IIJIMA, KIYOHITO
Executed: 2017-08-25
ISHIZAWA, SHIGERU
Executed: 2017-08-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing System