Patent Assignment
Reel/Frame 043440/0944
Assignment of Assignor's Interest
Recorded: 2017-08-29
Pages: 5
Assignors
BENJAMIN, NEIL MARTIN PAUL
Executed: 2017-08-28
POVOLNY, HENRY
Executed: 2017-08-24
RICCI, ANTHONY J.
Executed: 2017-08-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control
Application:
62/419,299 →