Patent Assignment
Reel/Frame 043448/0558
Assignment of Assignor's Interest
Recorded: 2017-08-30
Pages: 6
Assignors
POSLAVSKY, LEONID
Executed: 2017-07-12
SHAUGHNESSY, DERRICK
Executed: 2017-07-12
ZHUANG, GUORONG
Executed: 2017-07-12
SHCHEGROV, ANDREI V.
Executed: 2017-07-12
BAKEMAN, MICHAEL
Executed: 2017-08-30
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Confined Illumination For Small Spot Size Metrology
Patent:
10,006,865 →
Application:
15/640,961 →