Patent Assignment
Reel/Frame 043468/0103
Assignment of Assignor's Interest
Recorded: 2017-08-31
Pages: 3
Assignor
DEN BOEF, ARIE JEFFREY
Executed: 2008-03-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology