Patent Assignment
Reel/Frame 043474/0465
Assignment of Assignor's Interest
Recorded: 2017-09-01
Pages: 2
Assignors
SHOEB, JULINE
Executed: 2017-08-31
WU, YING
Executed: 2017-08-31
PATERSON, ALEX
Executed: 2017-08-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread