Patent Assignment
Reel/Frame 043507/0829
Assignment of Assignor's Interest
Recorded: 2017-09-06
Pages: 5
Assignors
FENG, YE
Executed: 2017-09-05
ARORA, RAJAN
Executed: 2017-08-10
SHIELDS, JASON
Executed: 2017-08-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Combining Optical Metrology with Mass Metrology