Patent Assignment
Reel/Frame 043510/0575
Assignment of Assignor's Interest
Recorded: 2017-09-06
Pages: 3
Assignors
LIU, CHEN-YU
Executed: 2017-06-30
CHANG, CHING-YU
Executed: 2017-06-30
LIN, CHIN-HSIANG
Executed: 2017-07-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Lithography Process with Enhanced Etch Selectivity