Patent Assignment
Reel/Frame 043558/0849
Assignment of Assignor's Interest
Recorded: 2017-09-12
Pages: 4
Assignors
YANG, DENGLIANG
Executed: 2017-09-06
KALINOVSKI, ILIA
Executed: 2017-09-06
FANG, HAOQUAN
Executed: 2017-09-06
CHEUNG, DAVID
Executed: 2017-09-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Detecting Oxygen in-Situ in a Substrate Area of a Substrate Processing System