Patent Assignment
Reel/Frame 043574/0251
Assignment of Assignor's Interest
Recorded: 2017-09-13
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Silicon Oxide and Silicon Nitride Selectively Against Each Other