Patent Assignment
Reel/Frame 043577/0790
Assignment of Assignor's Interest
Recorded: 2017-09-13
Pages: 4
Assignors
MARAKHTANOV, ALEXEI
Executed: 2017-09-05
ZHAO, LIN
Executed: 2017-09-06
KOZAKEVICH, FELIX
Executed: 2017-09-05
LUCCHESI, KENNETH
Executed: 2017-09-06
CHEN, ZHIGANG
Executed: 2017-09-05
HOLLAND, JOHN PATRICK
Executed: 2017-09-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Multi Regime Plasma Wafer Processing to Increase Directionality of Ions
Patent:
10,002,746 →
Application:
15/703,280 →