Patent Assignment
Reel/Frame 043578/0867
Assignment of Assignor's Interest
Recorded: 2017-09-13
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Slip Ring, Support Mechanism, and Plasma Processing Apparatus