Patent Assignment
Reel/Frame 043630/0732
Assignment of Assignor's Interest
Recorded: 2017-09-19
Pages: 4
Assignors
SAWACHI, ATSUSHI
Executed: 2017-07-05
AMIKURA, NORIHIKO
Executed: 2017-07-05
NISHINO, KOUJI
Executed: 2017-08-29
SAWADA, YOHEI
Executed: 2017-08-29
KISHIDA, YOSHIHARU
Executed: 2017-07-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply System, Substrate Processing System and Gas Supply Method