Patent Assignment
Reel/Frame 043634/0551
Assignment of Assignor's Interest
Recorded: 2017-09-20
Pages: 6
Assignors
TSUCHIHASHI, YUYA
Executed: 2017-09-05
MIURA, ATSUYASU
Executed: 2017-09-05
TSUJIKAWA, HIROKI
Executed: 2017-09-05
FUJITA, KAZUHIRO
Executed: 2017-09-20
IKEDA, MASAHIDE
Executed: 2017-09-05
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Recovery Piping Cleaning Method and Substrate Processing Apparatus