Patent Assignment
Reel/Frame 043661/0042
Assignment of Assignor's Interest
Recorded: 2017-09-22
Pages: 3
Assignors
POLO, ALESSANDRO
Executed: 2016-03-07
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2016-03-03
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Apparatus, Method of Measuring a Structure and Lithographic Apparatus