Patent Assignment
Reel/Frame 043682/0742
Assignment of Assignor's Interest
Recorded: 2017-09-25
Pages: 2
Assignors
ENKISCH, HARTMUT
Executed: 2016-08-29
HUBER, PETER
Executed: 2016-09-12
STROBEL, SEBASTIAN
Executed: 2016-08-23
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Producing a Mirror Element