Patent Assignment
Reel/Frame 043685/0343
Assignment of Assignor's Interest
Recorded: 2017-09-25
Pages: 4
Assignor
BRODIE, ALAN D.
Executed: 2017-07-18
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Method for Correcting Arrayed Astigmatism in a Multi-Column Scanning Electron Microscopy System