Assignment of Assignor's Interest

Recorded: 2017-09-26 Pages: 4

Assignors

HIGASHIJIMA, JIRO

Executed: 2017-09-04

OGATA, NOBUHIRO

Executed: 2017-09-04

HASHIMOTO, YUSUKE

Executed: 2017-09-04

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Processing Liquid Supply Method

Application: 15/715,227 →

Publication: US 2018/0090306