Patent Assignment
Reel/Frame 043725/0452
Assignment of Assignor's Interest
Recorded: 2017-09-28
Pages: 4
Assignors
KOSAKA, TAKURO
Executed: 2017-09-05
INAZUKI, YUKIO
Executed: 2017-09-05
KANEKO, HIDEO
Executed: 2017-09-05
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Halftone Phase Shift Photomask Blank, Making Method, and Halftone Phase Shift Photomask