Patent Assignment
Reel/Frame 043732/0054
Assignment of Assignor's Interest
Recorded: 2017-09-28
Pages: 4
Assignors
ABEL, JOSEPH
Executed: 2017-09-12
AGARWAL, PULKIT
Executed: 2017-09-12
PHILLIPS, RICHARD
Executed: 2017-09-18
KUMAR, PURUSHOTTAM
Executed: 2017-09-12
LAVOIE, ADRIEN
Executed: 2017-09-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dielectric Gapfill of High Aspect Ratio Features Utilizing a Sacrificial Etch Cap Layer