Patent Assignment
Reel/Frame 043802/0077
Assignment of Assignor's Interest
Recorded: 2017-10-06
Pages: 12
Assignors
LEE, DONG-HYUB
Executed: 2017-04-04
SUNG, DOUGYONG
Executed: 2017-04-04
WOO, JE-HUN
Executed: 2017-04-04
KIM, BONGSEONG
Executed: 2017-09-18
LEE, JUHO
Executed: 2017-04-04
JEON, YUN-KWANG
Executed: 2017-04-04
CHO, JUNGHYUN
Executed: 2017-04-04
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Antennas, Circuits for Generating Plasma, Plasma Processing Apparatus, and Methods of Manufacturing Semiconductor Devices Using the Same