Patent Assignment
Reel/Frame 043805/0283
Assignment of Assignor's Interest
Recorded: 2017-10-06
Pages: 3
Assignee
MITSUBISHI GAS CHEMICAL COMPANY, INC.
5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8324, JAPAN
Covered Property
(1)
Cleaning Solution and Cleaning Method for Material Comprising Carbon-Incorporated Silicon Oxide for Use in Recycling Wafer