Patent Assignment
Reel/Frame 043883/0221
Assignment of Assignor's Interest
Recorded: 2017-10-17
Pages: 4
Assignor
CHEN, YEN-LIANG
Executed: 2017-09-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Measuring Overlay Errors Using Overlay Measurement Patterns