Patent Assignment
Reel/Frame 043892/0050
Assignment of Assignor's Interest
Recorded: 2017-10-18
Pages: 3
Assignors
WADA, KEIJI
Executed: 2017-07-25
NISHIGUCHI, TARO
Executed: 2017-07-25
HIYOSHI, TORU
Executed: 2017-07-25
Assignee
SUMITOMO ELECTRIC INDUSTRIES, LTD.
5-33, KITAHAMA 4-CHOME, CHUO-KU, OSAKA-SHI, OSAKA, 541-0041, JAPAN
Covered Property
(1)
Method for Manufacturing Silicon Carbide Epitaxial Substrate, Silicon Carbide Epitaxial Substrate, Method for Manufacturing Silicon Carbide Semiconductor Device, and Silicon Carbide Semiconductor Device