Patent Assignment
Reel/Frame 043902/0169
Assignment of Assignor's Interest
Recorded: 2017-10-19
Pages: 4
Assignor
YANG, SONG-YI
Executed: 2017-04-03
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck Assembly and Semiconductor Manufacturing Apparatus Including the Same