Patent Assignment
Reel/Frame 043920/0340
Assignment of Assignor's Interest
Recorded: 2017-10-23
Pages: 6
Assignors
TRENKLER, JOHANN
Executed: 2005-11-14
MANN, HANS-JUERGEN
Executed: 2005-10-20
NOTHELFER, UDO
Executed: 2005-11-05
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Properties
(2)
Reflective Optical Element and Euv Lithography Appliance
Reflective Optical Element and Euv Lithography Appliance
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.