Patent Assignment
Reel/Frame 043940/0456
Assignment of Assignor's Interest
Recorded: 2017-10-24
Pages: 3
Assignors
LONG, MAOLIN
Executed: 2017-10-18
WANG, YUHOU
Executed: 2017-10-18
MARSH, RICKY
Executed: 2017-10-20
PATERSON, ALEX
Executed: 2017-10-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Matchless Plasma Source for Semiconductor Wafer Fabrication