Patent Assignment
Reel/Frame 043940/0936
Assignment of Assignor's Interest
Recorded: 2017-10-24
Pages: 3
Assignors
HSU, DUAN-FU STEPHEN
Executed: 2015-06-04
HOWELL, RAFAEL C.
Executed: 2015-06-04
JIA, JIANJUN
Executed: 2015-06-02
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Simulation of Lithography Using Multiple-Sampling of Angular Distribution of Source Radiation