Patent Assignment
Reel/Frame 043983/0470
Assignment of Assignor's Interest
Recorded: 2017-10-30
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multi-Beam Optical System Adjustment Method, and Multi-Beam Exposure Apparatus