Patent Assignment
Reel/Frame 043997/0285
Assignment of Assignor's Interest
Recorded: 2017-10-31
Pages: 4
Assignees
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANG JIANG ROAD, PUDONG NEW AREA, SHANGHAI, 201203, CHINA
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
18 WEN CHANG ROAD, ECONOMICAL-TECHNOLOGICAL, DEVELOPMENT AREA, DAXING DISTRICT, BEIJING, 100176, CHINA
Covered Property
(1)
Apparatus and Method for Detecting Overlay Mark with Bright and Dark Fields