Patent Assignment
Reel/Frame 044008/0368
Assignment of Assignor's Interest
Recorded: 2017-11-01
Pages: 3
Assignors
YAMAGUCHI, HIDETO
Executed: 2013-09-03
KOSUGI, TETSUYA
Executed: 2013-09-03
UENO, MASAAKI
Executed: 2013-09-03
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
15-12, NISHI-SHIMBASHI 2 CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Thermocouple Support
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.