Patent Assignment
Reel/Frame 044030/0493
Assignment of Assignor's Interest
Recorded: 2017-11-03
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Filter Device and Plasma Processing Apparatus