Patent Assignment
Reel/Frame 044070/0800
Assignment of Assignor's Interest
Recorded: 2017-11-08
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multi Charged Particle Beam Writing Apparatus and Multi Charged Particle Beam Writing Method