Patent Assignment
Reel/Frame 044085/0528
Assignment of Assignor's Interest
Recorded: 2017-11-09
Pages: 4
Assignors
SHAH, KARTIK
Executed: 2016-11-30
HOLLA, NISHA PRAKASH
Executed: 2016-11-30
KRITHIVASAN, VIJAYKUMAR
Executed: 2016-11-30
SUBRAMANI, ANANTHA K.
Executed: 2016-11-30
NOORBAKHSH, HAMID
Executed: 2016-11-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Two Zone Flow Cooling Plate Design with Concentric or Spiral Channel for Efficient Gas Distribution Assembly Cooling