Patent Assignment
Reel/Frame 044120/0073
Assignment of Assignor's Interest
Recorded: 2017-11-14
Pages: 4
Assignors
LIN, WANG-HUA
Executed: 2017-11-08
TAI, CHUN-LIANG
Executed: 2017-11-08
FAN, CHUN-HSIANG
Executed: 2017-11-08
YEH, MING-HSI
Executed: 2017-11-08
HUANG, KUO-BIN
Executed: 2017-11-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Wafer Cleaning Apparatus and Method for Cleaning Semiconductor Wafer