Patent Assignment
Reel/Frame 044159/0258
Assignment of Assignor's Interest
Recorded: 2017-11-17
Pages: 4
Assignor
PEITZSCH, SCOTT E.
Executed: 2017-11-02
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
System and Method for Minimizing Backside Workpiece Damage