Patent Assignment
Reel/Frame 044164/0261
Assignment of Assignor's Interest
Recorded: 2017-11-17
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Faceted Mirror for Euv Projection Lithography and Illumination Optical Unit with Same