Patent Assignment
Reel/Frame 044164/0485
Assignment of Assignor's Interest
Recorded: 2017-11-17
Pages: 3
Assignor
SCHWAB, MARKUS
Executed: 2017-11-08
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging Optical Unit and Projection Exposure Unit Including Same