Patent Assignment
Reel/Frame 044169/0515
Assignment of Assignor's Interest
Recorded: 2017-11-18
Pages: 2
Assignee
THE JAPAN STEEL WORKS, LTD.
11-1, OSAKI 1-CHOME, SHINAGAWA-KU, TOKYO, 141-0032, JAPAN
Covered Property
(1)
Apparatus for Atomic Layer Deposition and Exhaust Unit for Apparatus for Atomic Layer Deposition