Patent Assignment
Reel/Frame 044179/0568
Assignment of Assignor's Interest
Recorded: 2017-11-20
Pages: 5
Assignors
KARIYA, HIROYUKI
Executed: 2017-10-10
MORIKAWA, HIDEKI
Executed: 2017-10-10
ISHIKAWA, MASAKI
Executed: 2017-10-10
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Ion Implantation Method and Ion Implantation Apparatus