Patent Assignment
Reel/Frame 044193/0427
Assignment of Assignor's Interest
Recorded: 2017-11-21
Pages: 4
Assignor
AOKI, YASUO
Executed: 2017-10-24
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Exposure Apparatus, Manufacturing Method of Flat-Panel Display, Device Manufacturing Method, and Exposure Method