Patent Assignment
Reel/Frame 044201/0512
Assignment of Assignor's Interest
Recorded: 2017-11-22
Pages: 4
Assignors
YASUDA, SHUICHI
Executed: 2017-11-15
IWAO, MICHINORI
Executed: 2017-11-15
KIKUMOTO, NORIYUKI
Executed: 2017-11-15
SASAKI, MITSUTOSHI
Executed: 2017-11-15
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, 602-8585, JAPAN
Covered Property
(1)
Substrate Treatment Apparatus and Substrate Treatment Method