Patent Assignment
Reel/Frame 044201/0516
Assignment of Assignor's Interest
Recorded: 2017-11-22
Pages: 5
Assignors
ZHOU, XIANG
Executed: 2017-11-17
KIMURA, YOSHIE
Executed: 2017-11-17
XU, CHEN
Executed: 2017-11-16
UPADHYAYA, GANESH
Executed: 2017-11-17
BROOKS, MITCHELL
Executed: 2017-11-16
ZHANG, DUMING
Executed: 2017-11-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Deposition and Etch in a Single Plasma Chamber for Critical Dimension Control