Patent Assignment
Reel/Frame 044223/0116
Assignment of Assignor's Interest
Recorded: 2017-11-27
Pages: 3
Assignors
SU, YEN-SHUO
Executed: 2012-06-01
XIAO, YING
Executed: 2012-06-01
LIN, CHIN-HSIANG
Executed: 2012-08-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Control System for Plasma Chamber Having Controllable Valve and Method of Using the Same