Patent Assignment
Reel/Frame 044231/0962
Assignment of Assignor's Interest
Recorded: 2017-11-28
Pages: 2
Assignor
NAKANO, AKIYOSHI
Executed: 2017-11-15
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method