Assignment of Assignor's Interest

Recorded: 2017-11-28 Pages: 3

Assignors

ALBAREDE, LUC

Executed: 2017-11-16

KABOUZI, YASSINE

Executed: 2017-11-27

LUQUE, JORGE

Executed: 2017-11-27

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Method and Apparatus for Real-Time Monitoring of Plasma Chamber Wall Condition

Patent: 10,134,569 →

Application: 15/824,061 →