Patent Assignment
Reel/Frame 044237/0303
Assignment of Assignor's Interest
Recorded: 2017-11-28
Pages: 4
Assignee
LAM RESEARCH CORPORATION,
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Cathode Rf Asymmetry Detection Probe for Semiconductor Rf Plasma Processing Equipment