Patent Assignment
Reel/Frame 044260/0906
Assignment of Assignor's Interest
Recorded: 2017-11-30
Pages: 8
Assignors
HANASHIMA, TAKEO
Executed: 2017-11-24
SASAKI, TAKAFUMI
Executed: 2017-11-24
HIRAMATSU, HIROAKI
Executed: 2017-11-24
KAMAKURA, TSUKASA
Executed: 2017-11-24
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.