Patent Assignment
Reel/Frame 044263/0004
Assignment of Assignor's Interest
Recorded: 2017-11-30
Pages: 4
Assignors
MARUYAMA, KOJI
Executed: 2017-09-27
KOSHIISHI, AKIRA
Executed: 2017-11-14
HAGA, TOSHIO
Executed: 2017-09-28
HORIGUCHI, MASATO
Executed: 2017-10-10
KATO, MAKOTO
Executed: 2017-09-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Layer to Be Etched